Journal of the Ceramic Association, Japan
Online ISSN : 1884-2127
Print ISSN : 0009-0255
ISSN-L : 0009-0255
Direct Observation of the Formation Process of TiN Particles by CVD Method
Junichi HOJO, Akio KATO
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Keywords: Titanium nitride, CVD, Fine powder, Particle formation process
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1981 Volume 89 Issue 1029 Pages 277-279

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