Abstract
The effect of non-stoichiometry on the sintering of TiNx was studied at 1026°-1392°C for x=0.67-0.95. The rate of sintering decreased markedly with decreasing non-stoichiometry in TiNx. The results were tentatively analysed by the initial stage sintering equation. The diffusion coefficients of rate limiting species of sintering changed orders of magnitude for the region of non-stoichiometry studied. The relation between the defect concentration and the diffusion coefficient of rate limiting species of sintering was discussed. Sintering of TiNx was suggestedly controlled by the diffusion of nitrogen in the bulk.