Journal of the Ceramic Society of Japan
Online ISSN : 1882-1022
Print ISSN : 0914-5400
ISSN-L : 0914-5400
Special Issue by Guest Editors: Novel Materials Design and Processing by External and Internal Reaction Fields: Papers
Micropatterning of Inorganic-Organic Hybrid Thick Films from Vinyltriethoxysilane
Kiyoharu TADANAGAToshitsugu SUEKIAtsunori MATSUDATsutomu MINAMIMasahiro TATSUMISAGO
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2006 Volume 114 Issue 1325 Pages 125-127

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Abstract
Inorganic-organic hybrid films with a maximum thickness of about 40 μm were prepared from vinyltriethoxysilane (VTES) through a sol-gel process. UV light from a high-pressure mercury lamp was irradiated through a photomask on the hybrid films from VTES. IR and 29Si NMR spectra of the coating films showed that C=C bonds in VTES were polymerized by UV irradiation. Micropatterns with a maximum height of about 40 μm were formed by the etching of unirradiated area of the films.
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© 2006 The Ceramic Society of Japan
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