電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
論文
高い電流利得を有するVibrating-Body Field-Effect Transistorの提案
植木 真治西森 勇貴三輪 和弘中川 慎也今本 浩史久保田 智広杉山 正和寒川 誠二橋口 原
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キーワード: VB-FET, MOSFET, リング振動子
ジャーナル フリー

2013 年 133 巻 11 号 p. 332-336

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In this study, we propose a high current gain Vibrating-Body Field-Effect Transistor (Vertical VB-FET). The device has a specific structure in which drain, channel, and source electrodes of the FET are stacked. Since the current flow direction in the device is perpendicular to the wafer surface, the W/Lc (W : channel width, Lc : channel length) value is increased and improved the properties of Vertical VB-FET. In order to evaluate the dynamic properties, we derived the Lagrange's function and the dissipation function from a resistance-capacitance ladder equivalent circuit. Using these functions, we calculated the transconductance and current gain for a ring structured VB-FET. As a result, the estimated transconductance of the Vertical VB-FET was 1.81×10-2mS, whereas 1.78×10-4mS for the conventional type VB-FET with the same structure dimensions. The current gain of the vertical VB-FET also increased 15 times as large as the conventional one.

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