A nozzle plate and a cavity base plate are functional parts of an inkjet print head respectively. The thin nozzle plate deformed through heat and its configuration with the cavity base plate. This deformation resulted from a large gap between the linear expansion coefficient of the nozzle plate and the silicon cavity base plate, and brought the deterioration of print quality. In order to solve this problem we replaced the silicon with nickel, and the deformation of the nozzle was reduced. However, it confirmed the new issue of low punch durability of the precision mold when making the nickel cavity base plate by the material transfer processing. To solve this issue, we have decreased the deformation that is applied to the punch for transferring, made the specular surface to the tip of the punch with the grinding process and coated the surface with Diamond Like Carbon(DLC). It has been confirmed that the solutions described above increase the punch durability of the precision mold by 15 times.