レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
圧電MEMS光スキャナによる画像ディスプレイ
谷 雅直赤松 雅洋安田 喜昭藤田 博之年吉 洋
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2008 年 36 巻 4 号 p. 183-189

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This paper reports an optical MEMS (Micro Electro Mechanical System) scanner developed for projectiontype image display. A 3-micron-thick PZT film was deposited onto an SOI (Silicon-On-Insulator) wafer tocompose piezoelectric unimorph actuators. Two-dimensional scanning mirror mechanisms were designedwith a fast resonant axis of 11.2kHz for the horizontal line scan of image and a slow off-resonant axis for the vertical frame refresh at 60Hz. Technical requirement for the optical scanner is discussed in terms of the scan angle and speed for the VGA (Video Graphics Array) resolution. Optical scan angles of horizontal 39 degrees and vertical 29 degrees were experimentally obtained at drive voltages upwards of 40V. A simple demonstration of bitmap image projection with a laser light source is presented.

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