日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
垂直磁気記録
スパッタ法による垂直面内複合型媒体の作製
瀧澤 敦尚尾上 貴弘池田 真平山 貴邦朝日 透逢坂 哲彌酒井 浩志
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ジャーナル オープンアクセス

1999 年 23 巻 4_2 号 p. 973-976

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Perpendicular/longitudinal composite media were fabricated by sputtering. It is hard to deposit a perpendicular upper layer on a longitudinal underlayer because of the epitaxy between the layers. Therefore, it is important to prevent the epitaxial growth between the perpendicular upper layer and the longitudinal underlayer. For this purpose, we attempted to apply an amorphous carbon interlayer. First, the magnetic properties of perpendicular single media with Ti-Cr and C underlayers were compared. As a result, it was found that a perpendicular single medium with a C underiayer had the same property as a medium with a Ti-Cr underlayer. In accordance with these results, a perpendicular layer was deposited onto a longitudinal layer with a C interlayer. Consequently, the thickness of the C interlayer was optimized. As a result, a perpendicular/longitudinal composite medium was successfully fabricated using 5-nm C interlayer.

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© 1999 (社)日本応用磁気学会
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