In order to establish the high precision contour grinding method, the reference position correct sensor is first developed for compensating the thermal deformation of a machine structure, and then the controlled normal force grinding method is developed to control a fluctuation of a normal grinding force. Main conclusions obtained in this study are as follows: (1) It is made possible to correct the error of wheel depth of cut accurately, with using developed reference position correct sensor. (2) The controlled normal force grinding technique is developed, through the analysis of the feed rate setting conditions correspond to the curvature variation of a workpiece. (3) High performance contour grinding method, with which both constant surface roughness and high dimensional accuracy can be obtained in any curvature radius of a workpiece, is developed by using the controlled normal force grinding method incorporate the reference position correct sensor.