精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
異方性エッチングを用いた生体電位計測のための多層構造型マイクロプローブの開発
川島 貴弘横井 浩史柴田 隆行牧野 英司嘉数 侑昇
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2002 年 68 巻 9 号 p. 1185-1189

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This paper focuses on a development of a cortical signal recording system to analyze an information processing system in a brain, and describes a fabricated microprobe using techniques of the microfabrication for realizing a multi-site recording. In order to identify the brain system, the multi-site and simultaneous recording is required. However, the property of the invasiveness leads to miniaturizing such a device. Therefore, the multi-site microprobe was fabricated by applying a multilayer structure of electrical circuits. Moreover, the anisotropic etching was applied in order to simplify the fabrication process. And the electrical property of this microprobe was described.

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