In this paper, we propose a distributed routing method for multiple AGVs robots under uncertain motion delays. In real transportation environments, unexpected motion delays and demands may cause re-routings. The feature of the proposed method is that each AGV subsystem creates the routing to minimize the sum of the transportation time and the penalties for collisionn frequency distribution taking into account motion delay disturbances. The proposed method is applied to routing problem for a transportation system with 143 nodes and 20 AGVs in a semiconductor fabrication bay. The computational results show that the total transportation time obtained by the proposed method is shorter than that of the conventional method under various disturbances.