Ferromagnetic resonance (FMR) measurements using coplanar waveguides (CPWs) make it possible to perform highly sensitive magnetization measurements, since a CPW can concentrate electromagnetic waves onto a narrow signal line. In this study, we aimed to perform FMR measurements of a minute individual magnet, and investigated the dependence of the sensitivity on the signal line width. We fabricated CPWs on MgO wafers and placed an individual NiFe dot on each of CPWs. NiFe dots with a thickness of 30 nm and various lateral sizes, i.e. 50 × 100, 50 × 80, 50 × 30, 50 × 20, and 50 × 10 μm, were fabricated. The signal line widths of these samples were 150, 100, 50, 30, and 15 μm, respectively. The external magnetic field dependence of the resonance frequency was well fitted by Kittel’s formula. As expected, we obtained larger signals from smaller samples, because narrower signal lines that create larger rf fields were employed for smaller samples.