Removal of single particles adhering on a flat plate by a high-speed air jet has been investigated experimentally. Although jet nozzle or removal target is scanned in an industrial application of the air jet removal, almost all previous fundamental investigations for the air jet removal were carried out with a fixed nozzle and a fixed target. Therefore, we aimed at elucidating how the scanning speed of target flat plate affects the removal efficiency.
Experimental results showed that the removal efficiencies at a constant air pressure of the nozzle decreased with an increase in the scanning speed of the target plate. With an increase in the scanning speed, the residence time of adhered particles in the effective jet exposure area is decreased. Therefore, the decrease in the removal efficiency with an increase of the scanning speed is caused mainly by a decrease in the residence time in the impinging air jet. It was also found that the effective area can be estimated by the equation of stable removal region on a fixed target.