Diamond-like carbon (DLC) films have many excellent characteristics such as low friction coefficient, wear resistance, gas barrier property and biocompatibility. These many positive characteristics enable DLC coatings to be applied to a lot of fields from metallic materials to polymer materials for overcoatings. However, usual DLC film has a lot of micro-pores or pinholes, and those defects become problems as DLC film is not able to make the best use of abrasion resistance effectively due to the substrate corrosion. In addition, the DLC films deposited directly on the steel substrates often encountered the problem of poor adhesion. It has been attempted to overcome the negative effect by means of multilayer structure using metal and ceramic layers. In this study, we aim to deposit DLC films satisfied with both antiwear and anticorrosion characteristics. This time, we attempted to improve those properties by enhancing adhesion strength between DLC film and substrate. Interlayers used were a Si modified DLC (Si-C:H) interlayer deposited by using Si(CH₃)₄ gas and a Cr interlayer deposited with magnetron sputtering method. These interlayered DLC films were deposited on austenite stainless steel substrates. DLC films with Si-C:H and/or Cr interlayer were deposited by a pulse plasma CVD method using C₂H₂ gas. Three kinds of coatings: (1) substrate/Si-C:H/DLC, (2) substrate/Cr/DLC and (3) substrate/Cr/Si-C:H/DLC had been done. As fundamental tests, Raman spectroscopy, nano indentation, X-ray reflectometer analysis and rutherford back scattering spectrometry/elastic recoil detection analysis were carried out to reveal both mechanical and anticorrosion characteristics. Then, ball-on-disk tests and electrochemical measurements also had been running. These results lead us to conclusion that the effects of the DLC coating had been confirmed and an optimal structure to improve both tribological property and anticorrosion property was substrate/Si-C:H/DLC. Moreover, in the case of emphasizing tribological property, substrate/Cr/Si-C:H/DLC structure was recommended.