TiN films are superior in hardness and adhesive strength. However, friction coefficients of the TiN films are higher than those of DLC films. By adding molybdenum disulfide (MoS₂) up to 40%, the TiN-MoS₂ composite films with very low frictional properties could be obtained. In this study, the authors tried to reduce MoS₂ content in the high lubricious TiN-MoS₂ composite films by using a composite target of TiN and MoS₂ for improving the hardness. In addition, Ti interlayer was deposited in order to improve the adhesive strength. The friction coefficient of the composite film with MoS₂ content of 22% showed low friction coefficient which was almost equal to that of DLC film at room temperature and 200°C. The hardness of the newly developed high lubricious composite film was as high as 17GPa. In addition, the adhesive strength of the composite film was improved by forming the Ti interlayer.