Wheel loading is one of the serious problems on high efficiency grinding, creep feed grinding, and grinding using fine grain. Some researches ware experimentally demonstrated ultrasonically excited grinding fluid which includes cavitation bubble, prevent the loading and improve surface integrity. In this study, simple comb-form exciter has been developed. It is inserted between the fluid supplying nozzle and grinding point. Influence of distance between exciter and grinding point has been investigated to optimize distance. The performance of exciter has been investigated through grinding hard-to-grind material with WA grinding wheel. As a result on aluminum alloy and SUS, influences improvement of surface integrity, reduction of grinding force and suppression of grinding force escalation, with ultrasonically excited fluid generated by the comb-form exciter are confirmed. The performance of exciter has been investigated also for ferrous material which known as easy-to-grind material. As a result, surface integrity improvement which influenced by ultrasonically excited fluid is confirmed also for ferrous material.