We have studied the production process for a polygonal pillar electrode with a copper mask plate and electrical discharge machining of the tungsten material using this electrode. Planetary motion was applied to the mask plate in which a polygonal hole was machined in advance. The polygonal micropillar electrode was produced by this reduced scale process. Zinc alloy, which is easy to form by electrical discharge machining, was used for the electrode material. In this process, the machining conditions under which the wear of the mask plate was small and the forming rate of the electrode was high were chosen. In the next stage, polygonal microholes were drilled into the tungsten material using this electrode. In hole machining with a zinc alloy electrode, the removal rate became higher than that with a same-shape copper electrode. In order to perform simultaneous machining of a microelectrode and microholes, a tandem structure mechanism was developed. Continuous polygonal microhole machining was attained by applying the tandem mechanism.