精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
論文
広視野レーザ顕微鏡による円筒面全面のナノスケール計測
月山 陽介福島 直幸新田 勇
著者情報
ジャーナル フリー

2015 年 81 巻 7 号 p. 699-704

詳細
抄録

In a previous study, we developed a new method for observation of the whole cylindrical surface in a very short time,using a laser microscope with a wide field of view. When cylindrical specimens were rotated by a motor-driven rotary table, the focused laser light was scanned along a generatrix of the cylinder surface. Thus, the whole cylinder surface could be observed easily even over a very short time. As the obtained image was a developed view of the cylinder surface, it was easy to measure the distance between any two points on the cylindrical surface. In this study, we acquired interference images of the whole cylinder surface with the aid of a reference plane. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the nanoscale surface profile of the cylinder.

著者関連情報
© 2015 公益社団法人 精密工学会
前の記事
feedback
Top