The 5 pair layered FeSi₂ thermoelectric conversion module was manufactured by sintering five layers of p type and n type powder at the same time, using SPS (spark plasma sintering) method. This process is expected to have higher reliability and shorter manufacturing time compared with conventional process which is performed by joining machined p type and n type element with the electrode. Maximum power of 32.4 mW was provided by this module under the condition of heating temperature 773 K and cooling temperature 293 K. The changes of the module shape and sintering condition greatly changed the performance of this module. By the optimization of the sintering condition and the shape, the performance of this process can be expected to be higher. To obtain the high performance it is necessary to develop the module shape which has large temperature difference with low electric resistance and sintering condition which enable low thermal conductivity with high density.